Working in a clean-room necessitate a constant awareness of the danger, minimized by conforming to strict regulations, and a knowledge of the operating principle of the equipment. This is acquired by a thorough training of the use of the clean-room and of the machines before you are allowed to use them alone.
Training
Before a user can use a machine in the clean room, he has to go through the following training... and forms filling procedure:
- Understand the clean room regulations. Read carefully and understand the regulation of the clean-room.
- Register online. Register online to start up the process to work in the MML 1.
- Watch the Safety Video and pass the MML 1 Safety Test. It is compulsory to pass the test after you have gone through the 'Safety course' to be allowed to enter the cleanroom.
Users are recommended to access the course every 6 months to keep their basic first aid knowledge fresh. - Get the right to work in the center. Print the Authorization to Work in Micromachines Lab 1 form from your account page and after endorsment by your advisor and, for undergraduate student, by your mentor pass it to the MML 1 technician. After approval from the MML 1 Professor-in-Charge you are allowed to work in the center.
There are two type of Authorization to work in the MML 1: the first one is without clean-room access (usually for advisor or member needing only a few process to be requested to be performed by the centre technicians but who do not need to enter the clean-room at all) and the second with clean-room access. This second type allows to enter the cleanroom and can only be obtained after passing succesfully the safety test. It only gives you access to the clean-room and allows you to use alone the small equipment (optical microscope, probe-station). However, this authorization does not allow you to operate any other MML 1 machine by yourself! If you need other MML 1 machines, you first need to be trained on it! - Verify you are allowed to use the MML 1 Machine. Before you ask to be trained, verify that you are allowed to use the machine in the table below (Undergraduate are currently not allowed to use the wetbench - strong acids or bases don't mix well with FYP or UROP...). Note that if you are not allowed to operate a particular machine you may use the form for Request for MML 1 Process and the person in charge will do the process for you. Note that some process have an online Request system available but currently you still need to fill in the paper form too!
Machine with 'Special' user means that only a limited number of operators (usually a research staff or a technician) is authorized to use the machine, and you have to fill a Request for MML 1 Process to have process performed. (If you need frequently one 'special' machine, a Research staff or a Research student may be authorized on a case by case basis to use the machine alone but only after extensive training, that could last several months.).MML 1 Machine
Authorized user
Undergraduate Research student Research staff Special Bonder Aligner No Yes Yes No CMP Logitech No Yes Yes No Delta 150 VPO (Vapor Prime Process) Yes Yes Yes No E-beam evaporator No Yes Yes No Electroplating (Copper) Yes Yes Yes No Ellipsometer Yes Yes Yes No Fotonic Sensor No No No No Furnace - Annealing No No No Yes Furnace - LTO No No No No Furnace - Nitride No No No No Furnace - Oxidation No No No Yes Furnace - PolySi No No No No Hotplate Yes Yes Yes No Intellisuite Yes Yes Yes No L-Edit Yes Yes Yes No Mask aligner (Karl Suss) No Yes Yes No Mask aligner (OAI) Yes Yes Yes No Olympios Yes Yes Yes No Probe Station (Cascade) Yes Yes Yes No Probe Station (HF) Yes Yes Yes No Probe station (Karl Suss) Yes Yes Yes No RIE (Technics) Yes Yes Yes No RIE Deep (Alcatel) No No No No RIE Deep (STS) No No No Yes SEM Yes Yes Yes No Spin Coater (CEE) Yes Yes Yes No Spin Coater (Delta 80BM) Yes Yes Yes No Spin coater (P-6700) Yes Yes Yes No Spin Coater (RC5) Yes Yes Yes No Spin Dryer Yes Yes Yes No Sputter Magnetron No No No Yes Stress measurement (Tencor) Yes Yes Yes No Stylus Profilometer Yes Yes Yes No Wafer bonder No Yes Yes No Wafer Dicing No No No Yes Wet Bench No Yes Yes No Wire bonder Yes Yes Yes No - Get a Certificate for Use of MML 1 Machine form. Before you start the training you will need one Certificate for Use of MML 1 Machine for each machine you want to use. Note that each machine requires a different number of training session specified on the form.
- Get approval on the certificate. Get the Certificate for Use of MML 1 machine endorsed by your advisor and pass it to the MML 1 technician to get approval from the MML 1 Professor-in-Charge. When the form is approved you are allowed to be trained on the machine.
- Get trained. You have to arrange your training session by yourself. Training can be given by the person in charge of the machine or by any user who has been already certified on the machine since more than 6 months. The number of training session needed is different for each machine and is given in the form. After each training session the trainer fills one training box in the Certificate for Use of MML 1 Machine, writing his name, the date of training and signing. Note that the trainer take responsibility for the training, if it is found that the trainer is not doing proper training, the certification of the trainer will be revoked.
Trainee users are not allowed to operate the machine alone. - Get certified. After you have performed the required number of training session as specified on the form your skill will be checked by the Certifying Staff who will ask you to demonstrate the operation of the machine or simply ask you a few questions. The Certifying Staff will then give certification by signing the form or recommend that you do more training.
The Certifying Member, as listed above, is the primary contact in case you have any doubt on the operation of the machine.Machine
Certifying Staff
Bonder Aligner HO Kar Kiat CMP Logitech PEK Soo Siong Delta 150 VPO (Vapor Prime Process) HO Kar Kiat E-beam evaporator PEK Soo Siong Electroplating (Copper) PEK Soo Siong Ellipsometer HO Kar Kiat Furnace - Annealing Nordin Bin Abdul Kassim Furnace - Oxidation Nordin Bin Abdul Kassim Hotplate HO Kar Kiat Intellisuite Nordin Bin Abdul Kassim L-Edit Nordin Bin Abdul Kassim Mask aligner (Karl Suss) HO Kar Kiat Mask aligner (OAI) HO Kar Kiat Olympios Nordin Bin Abdul Kassim Probe Station (Cascade) Nordin Bin Abdul Kassim Probe Station (HF) Nordin Bin Abdul Kassim Probe station (Karl Suss) Nordin Bin Abdul Kassim RIE (Technics) HO Kar Kiat RIE Deep (Alcatel) HOONG Sin Poh RIE Deep (STS) HOONG Sin Poh SEM Nordin Bin Abdul Kassim Spin Coater (CEE) HO Kar Kiat Spin Coater (Delta 80BM) HO Kar Kiat Spin coater (P-6700) HO Kar Kiat Spin Coater (RC5) HO Kar Kiat Spin Dryer HO Kar Kiat Sputter Magnetron PEK Soo Siong Stress measurement (Tencor) Nordin Bin Abdul Kassim Stylus Profilometer HOONG Sin Poh Wafer bonder HO Kar Kiat Wet Bench PEK Soo Siong Wire bonder HOONG Sin Poh - Use the machine. Before using any machine all users are required to book it using their user/family name and the password they gave in the Authorization to Work in MML 1. Booking is compulsory even if it for the same day. This is to ensure a proper record of use is kept and help schedule proper maintenance.
If any user is found using an equipment without his name recorded in the booking database, after a first time warning, his booking password will be supressed and he will have to go through the certification procedure again.
If any user is found using one machine without having a valid Certificate for Use of MML 1 Machine, he will be banned from the cleanroom for 4 months.
