The Micro Machines Centre (MMC) in the School of Mechanical and Aerospace Engineering in NTU is the key laboratory that is closely linked to the MEMS Strategic Research Programme in the School. It provides a hands-on design and processing environment, and it is completely devoted to research and teaching of micromachining and micro-electro-mechanical systems (MEMS).
The key asset of the centre is its clean room equipped with a number of machines and systems for silicon micro fabrication processes including thin film deposition, lithography, material etching and device packaging and testing. It supports 4-inch wafers and is capable of fabricating micro devices using silicon, polymers, SMA and PZT based materials.
Moreover the Centre has made available a number of software tools for simulation and development:
- Intellisuite (3 licenses) : MEMS simulation
- Coventor (1 license) : MEMS simulation
- L-Edit (10 licenses) : MEMS layout editor
- LinkCAD (1 license) : Layout format converter
- Olympios (1 license) : Optical waveguide simulation
The educational role of the Centre is particularly seen through his action in supporting Final Year Project (more than 30 projects each year) for undergraduate students. Moreover the Centre plays an important role in the graduate MSc MEMS course, a one year MEMS intensive dual-program between the School of MAE and the ESIEE, a French top Engineering school in Paris.
The Centre is more than 600 m2 over two levels (including a 200 m2 class 100/10000 clean-room), divided into 6 zones : processing, photolithography, chemical work, device characterization and packaging, simulation, and clean-room support.
They are currently 6 technicians attached to the MicroMachines Centre to maintain the facilities and for providing process.
If you want to use the process service, for process consultation and/or MEMS fabrication, please contact the MMC.
A large number of academic staffs and graduate students are associated with the Centre which also hosts several collaborative projects on micro machines with different universities, research institutes, and companies in USA, Europe, Japan and China.
