Members of MMC
The MicroMachines Center is aimed at facilitating the MEMS research in the school of MAE, and in NTU. Its main asset is the class 100/10k clean-room with state of the art fabrication facility. The center also has different equipment used for thin film characterization, MEMS testing and sofware for mask design (L-Edit™) and MEMS simulation (Intellisuite™ and Coventor™).
Moreover the Center provides space for setting up experiment, offices for the researchers (graduate and post-doctoral students) and a meeting room for seminar.
All those ressources are accessible to NTU users, automatically if they belong to the school of MAE, and after simple arrangement if they come from other schools in NTU.
External users from other universities, research institutes or the industry are also welcome, and the use of the Center equipment is either based on research project or on a fee.
The center can also provide process consultation and MEMS fabrication service. If you want to use the process service please contact the MMC.
MAE Users
MAE Faculty
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ASUNDI, Anand Fiber sensors, Optical MEMS, optical metrology |
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BUTLER David Characteisation of Polymeric MEMS Structure |
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CHAN Siew Hwa Development of Intermediate/Low- Temperature SOFC |
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CHAN Weng Kong Investigation of Liquid Droplet Deposition on a Solid Surface for Biomedical Kit Development |
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CHOLLET, Franck Optical MEMS, integrated optics, micro-nano-fabrication technology |
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DU Hejun Accelerometer, Gyroscope, Actuator |
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GONG Thomas Fluidic MEMS, Biomedical MEMS |
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GUO Ningqun SEM Analysis of a PVDF Hollow Fibre Membrane |
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HUANG Weimin Shape memory alloy for MEMS |
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HUANG Xiaoyang Microfluids |
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JIANG San Ping Deverlopment of Intermedia Temperature Solid Oxide Fuel Cells |
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LAM Khin Yong Computational MEMS/BioMEMS |
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LAM Yee Cheong Optimization of Micropatterning Process |
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LAU Gih Keong Polymer Micro-Electro-Mechanical Actuators |
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LI Lin Development of Conductive Polymeric |
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LI King Ho, Holden MEMS Encapsulation |
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LIAO Kin Thin-film |
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LIM Mong King Design and Development of Ultrasonic Transducer for Home Ultrasound System |
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LIN Rongming Mechanical sensor, Gyroscope, Microphone |
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LING Shihfu Development of Novel Sensors for Dynamic Measurement |
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LIU Yong NiTiHf High Temperature Shape Memory Alloys Thin Film |
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LIU Erjia Nanoimprinting of Polymeric Materials |
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LOH Ngiap Hiang Development and Analysis of Micro Powder Injection Molding |
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MIAO Jianmin Fabrication technology, Microphone, RF MEMS |
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MURUKESHAN Vadakke Matham Resolution Enhancement Techniques for sub65nm Optical Projection Lithography |
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NG Wansing Microactivation for Gastrointestinal Endoscopy |
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NGUYEN, Nam-Trung Fluidic MEMS fabrication and modelisation |
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ONG Lin Seng Development of Micro-optical Elements Based Optical Sorting Technique |
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OOI Kim Tiow Electrokinetic Flows in Closed-End Microchannels |
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RITCHIE Alastair Campbell Study on Effect of Mechanical Stimulation on Enteric Cells |
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SHEARWOOD, Christopher Micro and Nano-needles, Nano-metals, SMA, Micro-motors, Magnetostriction |
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SRIDHAR Idapalapati Carbon Nanotube Applications |
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TAN Ming Jen Thickness effect on Phase Transformation behaviour of TiNicu Thin Film |
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WONG Teck Neng Electrokinetic Phenomenon of Liquid Flow for BIO-MEMS |
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WU Mao See Analysis of PZT Actuator |
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XIAO Zhongmin Compliant system, micro-mirror |
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YANG Chun Electro-Kenetic Mixing in Microchannel with application in Biochips |
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YUE Chee Yoon Microfluidic Optimisation Process |
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ZHANG Shanyong Nanocomposite DLC Thin Films For Biomems |
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ZHENG Lianxi Synthesis and Characteriation of CNT |
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ZHONG Zhao Wei Fabrication of Microgripper Prototype |
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ZHOU Wei TEM Sample Preparation |
MAE Research staff
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ABGRALL Patrick   Nanofluidics (Advisor : NGUYEN, Nam-Trung) |
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ASHRAF Mohammed   Nanopatterning (Advisor : MURUKESHAN Vadakke Matham) |
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CHOO Kok Fah Chip Encapsulation (Advisor : LI King Ho, Holden) |
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CHUA Jeun Kee Resolution Enhancement Techniques for sub65nm Optical Projection Lithography (Advisor : MURUKESHAN Vadakke Matham) |
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LENG Yongjun Development of Intermediate / Low-Temperature SOFC (Advisor : CHAN Siew Hwa) |
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LI Hui The growth of aligned CNT (Advisor : MIAO Jianmin) |
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LI Aidan Microfuel Cell Research (Advisor : CHAN Siew Hwa) |
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LIE Hilda Fabrication of Microfluidic Channels (Advisor : LAM Yee Cheong) |
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ONG Shin Rong MEMS Fabrication of Thermoelectric devices (Advisor : LI King Ho, Holden) |
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ONG Soon Eng  Dielectrophoresis (Advisor : DU Hejun; ZHANG Shanyong) |
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PAN Xiaojun I-V Compound Material MEMS (Advisor : MIAO Jianmin) |
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QU Weijuan Digital Holography (Advisor : ASUNDI, Anand) |
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SIM Yeow Kiat Wafer Level Encapsulation (Advisor : LI King Ho, Holden) |
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THUBTHIMTHONG Borriboon Microactuator Fabrication for Photonic Crystal (Advisor : MURUKESHAN Vadakke Matham) |
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TING Eng Kiat A Method for DNA Extraction (Advisor : GONG Thomas) |
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TJEUNG Ricky Theodore Microfluidic Devices (Advisor : LAM Yee Cheong) |
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WANG Zhi Hong Piezoelectric Ultrasonic Transducer by Micromachining (Advisor : MIAO Jianmin) |
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ZHONG Shaoping Development of Turbular Scaffold for Bioreactor (Advisor : RITCHIE Alastair Campbell) |
MAE PhD Student
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MAE MEng Student
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MAE MSc Student
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Undergraduate Student
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Other NTU school users
NTU Faculty
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NTU Research staff
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NTU Research student
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Other Tertiary Institution Users
NUS-AStar Supervisor
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NUS-AStar Staff/student
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External users
The MicroMachines Center has supported along the years different projects from Singaporean companies, research institutes, other Universities and other schools in NTU.
